2/18/10	12:01:22 AM	Program started normally
2/18/10	12:01:22 AM	Helium valve closed
2/18/10	12:01:22 AM	H2 valve closed
2/18/10	12:01:22 AM	BCl3 valve closed
2/18/10	12:01:22 AM	PH3 valve closed
2/18/10	12:01:22 AM	SiCl4 pre valve closed
2/18/10	12:01:22 AM	SiCl4 post valve closed
2/18/10	12:01:22 AM	Main Vac valve closed
2/18/10	12:01:22 AM	Bypass valve closed
2/18/10	12:01:22 AM	Bubbler valve closed
2/18/10	12:01:22 AM	Helium MFC set to  0.000000
2/18/10	12:01:22 AM	H2 MFC set to  0.000000
2/18/10	12:01:22 AM	BCl3 MFC set to  0.000000
2/18/10	12:01:22 AM	SiCl4 MFC set to  0.000000
2/18/10	12:01:22 AM	Bypass solenoid MFC set to  760.000000
2/18/10	12:01:22 AM	Tube furnace set to 0
2/18/10	12:01:23 AM	Bypass valve opened
2/18/10	12:01:24 AM	Bypass valve closed
2/18/10	12:01:25 AM	Bubbler valve opened
2/18/10	12:01:26 AM	Bypass valve opened
2/18/10	12:01:28 AM	Bypass valve closed
2/18/10	12:01:28 AM	Bubbler valve closed
2/18/10	12:01:29 AM	Bubbler valve opened
2/18/10	12:01:30 AM	Bypass valve opened
2/18/10	12:01:30 AM	Bypass valve closed
2/18/10	12:01:33 AM	Bypass valve opened
2/18/10	12:01:34 AM	Bypass valve closed
2/18/10	12:01:35 AM	Bubbler valve closed
2/18/10	12:01:46 AM	Bubbler valve opened
2/18/10	12:01:46 AM	Bubbler valve closed
2/18/10	12:01:46 AM	Bubbler valve opened
2/18/10	12:01:47 AM	Bypass valve opened
2/18/10	12:01:48 AM	Bypass valve closed
2/18/10	12:01:49 AM	Bubbler valve closed
2/18/10	12:01:50 AM	Program exited cleanly
2/18/10	12:02:05 AM	Program started normally
2/18/10	12:02:05 AM	Helium valve closed
2/18/10	12:02:05 AM	H2 valve closed
2/18/10	12:02:05 AM	BCl3 valve closed
2/18/10	12:02:05 AM	PH3 valve closed
2/18/10	12:02:05 AM	SiCl4 pre valve closed
2/18/10	12:02:05 AM	SiCl4 post valve closed
2/18/10	12:02:05 AM	Main Vac valve closed
2/18/10	12:02:05 AM	Bypass valve closed
2/18/10	12:02:05 AM	Bubbler valve closed
2/18/10	12:02:05 AM	Helium MFC set to  0.000000
2/18/10	12:02:05 AM	H2 MFC set to  0.000000
2/18/10	12:02:05 AM	BCl3 MFC set to  0.000000
2/18/10	12:02:05 AM	SiCl4 MFC set to  0.000000
2/18/10	12:02:05 AM	Bypass solenoid MFC set to  760.000000
2/18/10	12:02:05 AM	Tube furnace set to 0
2/18/10	12:02:07 AM	Helium valve opened
2/18/10	12:02:08 AM	Helium valve closed
2/18/10	12:02:09 AM	Bubbler valve opened
2/18/10	12:02:24 AM	Bubbler valve closed
2/18/10	12:02:26 AM	Program exited cleanly
2/18/10	12:11:24 AM	Program started normally
2/18/10	12:11:24 AM	Helium valve closed
2/18/10	12:11:24 AM	H2 valve closed
2/18/10	12:11:24 AM	BCl3 valve closed
2/18/10	12:11:24 AM	PH3 valve closed
2/18/10	12:11:24 AM	SiCl4 pre valve closed
2/18/10	12:11:24 AM	SiCl4 post valve closed
2/18/10	12:11:24 AM	Main Vac valve closed
2/18/10	12:11:24 AM	Bypass valve closed
2/18/10	12:11:24 AM	Bubbler valve closed
2/18/10	12:11:24 AM	Helium MFC set to  0.000000
2/18/10	12:11:24 AM	H2 MFC set to  0.000000
2/18/10	12:11:24 AM	BCl3 MFC set to  0.000000
2/18/10	12:11:24 AM	SiCl4 MFC set to  0.000000
2/18/10	12:11:24 AM	Bypass solenoid MFC set to  760.000000
2/18/10	12:11:24 AM	Tube furnace set to 0
2/18/10	12:11:50 AM	Program exited cleanly
2/18/10	12:13:21 AM	Program started normally
2/18/10	12:13:21 AM	Helium valve closed
2/18/10	12:13:21 AM	H2 valve closed
2/18/10	12:13:21 AM	BCl3 valve closed
2/18/10	12:13:21 AM	PH3 valve closed
2/18/10	12:13:21 AM	SiCl4 pre valve closed
2/18/10	12:13:21 AM	SiCl4 post valve closed
2/18/10	12:13:21 AM	Main Vac valve closed
2/18/10	12:13:21 AM	Bypass valve closed
2/18/10	12:13:21 AM	Bubbler valve closed
2/18/10	12:13:21 AM	Helium MFC set to  0.000000
2/18/10	12:13:21 AM	H2 MFC set to  0.000000
2/18/10	12:13:21 AM	BCl3 MFC set to  0.000000
2/18/10	12:13:21 AM	SiCl4 MFC set to  0.000000
2/18/10	12:13:21 AM	Bypass solenoid MFC set to  760.000000
2/18/10	12:13:21 AM	Tube furnace set to 0
2/18/10	12:13:21 AM	Bypass valve opened
2/18/10	12:13:24 AM	Bypass valve closed
2/18/10	12:13:25 AM	Bubbler valve opened
2/18/10	12:13:33 AM	Bubbler valve closed
2/18/10	12:13:35 AM	Bubbler valve opened
2/18/10	12:13:36 AM	Bubbler valve closed
2/18/10	12:13:53 AM	Bypass valve opened
2/18/10	12:13:58 AM	Bypass valve closed
2/18/10	12:13:59 AM	Main Vac valve opened
2/18/10	12:14:03 AM	Program exited cleanly
2/18/10	12:39:12 AM	Program started normally
2/18/10	12:39:12 AM	Helium valve closed
2/18/10	12:39:12 AM	H2 valve closed
2/18/10	12:39:12 AM	BCl3 valve closed
2/18/10	12:39:12 AM	PH3 valve closed
2/18/10	12:39:12 AM	SiCl4 pre valve closed
2/18/10	12:39:12 AM	SiCl4 post valve closed
2/18/10	12:39:12 AM	Main Vac valve closed
2/18/10	12:39:12 AM	Bypass valve closed
2/18/10	12:39:12 AM	Bubbler valve closed
2/18/10	12:39:12 AM	Helium MFC set to  0.000000
2/18/10	12:39:12 AM	H2 MFC set to  0.000000
2/18/10	12:39:12 AM	BCl3 MFC set to  0.000000
2/18/10	12:39:12 AM	SiCl4 MFC set to  0.000000
2/18/10	12:39:12 AM	Bypass solenoid MFC set to  760.000000
2/18/10	12:39:12 AM	Tube furnace set to 0
2/18/10	12:39:13 AM	Helium valve opened
2/18/10	12:39:14 AM	Helium valve closed
2/18/10	12:39:15 AM	H2 valve opened
2/18/10	12:39:15 AM	H2 valve closed
2/18/10	12:39:16 AM	BCl3 valve opened
2/18/10	12:39:17 AM	BCl3 valve closed
2/18/10	12:39:17 AM	PH3 valve opened
2/18/10	12:39:18 AM	PH3 valve closed
2/18/10	12:39:19 AM	SiCl4 pre valve opened
2/18/10	12:39:20 AM	SiCl4 pre valve closed
2/18/10	12:39:20 AM	SiCl4 post valve opened
2/18/10	12:39:21 AM	SiCl4 post valve closed
2/18/10	12:39:21 AM	Helium valve opened
2/18/10	12:39:22 AM	BCl3 valve opened
2/18/10	12:39:23 AM	H2 valve opened
2/18/10	12:39:24 AM	Helium valve closed
2/18/10	12:39:24 AM	H2 valve closed
2/18/10	12:39:25 AM	BCl3 valve closed
2/18/10	12:39:26 AM	Bubbler valve opened
2/18/10	12:39:29 AM	Bubbler valve closed
2/18/10	12:39:29 AM	Bypass valve opened
2/18/10	12:39:32 AM	Main Vac valve opened
2/18/10	12:39:36 AM	Main Vac valve closed
2/18/10	12:39:37 AM	Bypass valve closed
2/18/10	12:39:40 AM	Program exited cleanly
2/18/10	12:46:06 AM	Program started normally
2/18/10	12:46:06 AM	Helium valve closed
2/18/10	12:46:06 AM	H2 valve closed
2/18/10	12:46:06 AM	BCl3 valve closed
2/18/10	12:46:06 AM	PH3 valve closed
2/18/10	12:46:06 AM	SiCl4 pre valve closed
2/18/10	12:46:06 AM	SiCl4 post valve closed
2/18/10	12:46:06 AM	Main Vac valve closed
2/18/10	12:46:06 AM	Bypass valve closed
2/18/10	12:46:06 AM	Bubbler valve closed
2/18/10	12:46:06 AM	Helium MFC set to  0.000000
2/18/10	12:46:06 AM	H2 MFC set to  0.000000
2/18/10	12:46:06 AM	BCl3 MFC set to  0.000000
2/18/10	12:46:06 AM	SiCl4 MFC set to  0.000000
2/18/10	12:46:06 AM	Bypass solenoid MFC set to  760.000000
2/18/10	12:46:06 AM	Tube furnace set to 0
2/18/10	12:46:11 AM	Bubbler valve opened
2/18/10	12:46:12 AM	Bubbler valve closed
2/18/10	12:46:13 AM	Bypass valve opened
2/18/10	12:46:17 AM	Main Vac valve opened
2/18/10	12:46:20 AM	Main Vac valve closed
2/18/10	12:46:20 AM	Bypass valve closed
2/18/10	12:46:47 AM	Program exited cleanly
2/18/10	12:48:15 AM	Program started normally
2/18/10	12:48:15 AM	Helium valve closed
2/18/10	12:48:15 AM	H2 valve closed
2/18/10	12:48:15 AM	BCl3 valve closed
2/18/10	12:48:15 AM	PH3 valve closed
2/18/10	12:48:15 AM	SiCl4 pre valve closed
2/18/10	12:48:15 AM	SiCl4 post valve closed
2/18/10	12:48:15 AM	Main Vac valve closed
2/18/10	12:48:15 AM	Bypass valve closed
2/18/10	12:48:15 AM	Bubbler valve closed
2/18/10	12:48:15 AM	Helium MFC set to  0.000000
2/18/10	12:48:15 AM	H2 MFC set to  0.000000
2/18/10	12:48:15 AM	BCl3 MFC set to  0.000000
2/18/10	12:48:15 AM	SiCl4 MFC set to  0.000000
2/18/10	12:48:15 AM	Bypass solenoid MFC set to  760.000000
2/18/10	12:48:15 AM	Tube furnace set to 0
2/18/10	12:48:26 AM	Program exited cleanly
2/18/10	2:05:53 AM	Program started normally
2/18/10	2:05:53 AM	Helium valve closed
2/18/10	2:05:53 AM	H2 valve closed
2/18/10	2:05:54 AM	BCl3 valve closed
2/18/10	2:05:54 AM	PH3 valve closed
2/18/10	2:05:54 AM	SiCl4 pre valve closed
2/18/10	2:05:54 AM	SiCl4 post valve closed
2/18/10	2:05:54 AM	Main Vac valve closed
2/18/10	2:05:54 AM	Bypass valve closed
2/18/10	2:05:54 AM	Bubbler valve closed
2/18/10	2:05:54 AM	Helium MFC set to  0.000000
2/18/10	2:05:54 AM	H2 MFC set to  0.000000
2/18/10	2:05:54 AM	BCl3 MFC set to  0.000000
2/18/10	2:05:54 AM	SiCl4 MFC set to  0.000000
2/18/10	2:05:54 AM	Bypass solenoid MFC set to  760.000000
2/18/10	2:05:54 AM	Tube furnace set to 0
2/18/10	2:06:02 AM	SiCl4 post valve opened
2/18/10	2:06:02 AM	SiCl4 post valve closed
2/18/10	2:06:03 AM	SiCl4 post valve opened
2/18/10	2:06:03 AM	SiCl4 post valve closed
2/18/10	2:06:07 AM	SiCl4 post valve opened
2/18/10	2:06:07 AM	SiCl4 post valve closed
2/18/10	2:06:13 AM	Tube furnace set to 678
2/18/10	2:06:16 AM	Tube furnace set to 1100
2/18/10	2:06:22 AM	Tube furnace set to 1100
2/18/10	2:06:57 AM	Program exited cleanly
2/18/10	10:12:43 AM	Program started normally
2/18/10	10:12:43 AM	Helium valve closed
2/18/10	10:12:43 AM	H2 valve closed
2/18/10	10:12:43 AM	BCl3 valve closed
2/18/10	10:12:43 AM	PH3 valve closed
2/18/10	10:12:43 AM	SiCl4 pre valve closed
2/18/10	10:12:43 AM	SiCl4 post valve closed
2/18/10	10:12:43 AM	Main Vac valve closed
2/18/10	10:12:43 AM	Bypass valve closed
2/18/10	10:12:43 AM	Bubbler valve closed
2/18/10	10:12:43 AM	Helium MFC set to  0.000000
2/18/10	10:12:43 AM	H2 MFC set to  0.000000
2/18/10	10:12:43 AM	BCl3 MFC set to  0.000000
2/18/10	10:12:43 AM	SiCl4 MFC set to  0.000000
2/18/10	10:12:43 AM	Bypass solenoid MFC set to  760.000000
2/18/10	10:12:43 AM	Tube furnace set to 0
2/18/10	10:12:58 AM	Program exited cleanly
2/18/10	6:03:57 PM	Program started normally
2/18/10	6:03:57 PM	Helium valve closed
2/18/10	6:03:58 PM	H2 valve closed
2/18/10	6:03:58 PM	BCl3 valve closed
2/18/10	6:03:58 PM	PH3 valve closed
2/18/10	6:03:58 PM	SiCl4 pre valve closed
2/18/10	6:03:58 PM	SiCl4 post valve closed
2/18/10	6:03:58 PM	Main Vac valve closed
2/18/10	6:03:58 PM	Bypass valve closed
2/18/10	6:03:58 PM	Bubbler valve closed
2/18/10	6:03:58 PM	Helium MFC set to  0.000000
2/18/10	6:03:58 PM	H2 MFC set to  0.000000
2/18/10	6:03:58 PM	BCl3 MFC set to  0.000000
2/18/10	6:03:58 PM	SiCl4 MFC set to  0.000000
2/18/10	6:03:58 PM	Bypass solenoid MFC set to  760.000000
2/18/10	6:03:58 PM	Tube furnace set to 0
2/18/10	6:04:59 PM	Program exited cleanly
2/18/10	7:08:26 PM	Program started normally
2/18/10	7:08:26 PM	Helium valve closed
2/18/10	7:08:26 PM	H2 valve closed
2/18/10	7:08:26 PM	BCl3 valve closed
2/18/10	7:08:26 PM	PH3 valve closed
2/18/10	7:08:26 PM	SiCl4 pre valve closed
2/18/10	7:08:26 PM	SiCl4 post valve closed
2/18/10	7:08:26 PM	Main Vac valve closed
2/18/10	7:08:26 PM	Bypass valve closed
2/18/10	7:08:26 PM	Bubbler valve closed
2/18/10	7:08:26 PM	Helium MFC set to  0.000000
2/18/10	7:08:26 PM	H2 MFC set to  0.000000
2/18/10	7:08:26 PM	BCl3 MFC set to  0.000000
2/18/10	7:08:26 PM	SiCl4 MFC set to  0.000000
2/18/10	7:08:26 PM	Bypass solenoid MFC set to  760.000000
2/18/10	7:08:26 PM	Tube furnace set to 0
2/18/10	7:08:27 PM	Helium valve opened
2/18/10	7:08:28 PM	Helium valve closed
2/18/10	7:08:29 PM	SiCl4 post valve opened
2/18/10	7:08:30 PM	SiCl4 post valve closed
2/18/10	7:08:31 PM	BCl3 valve opened
2/18/10	7:08:32 PM	BCl3 valve closed
2/18/10	7:08:33 PM	PH3 valve opened
2/18/10	7:08:33 PM	PH3 valve closed
2/18/10	7:08:59 PM	Program exited cleanly
2/18/10	8:12:30 PM	Program started normally
2/18/10	8:12:30 PM	Helium valve closed
2/18/10	8:12:30 PM	H2 valve closed
2/18/10	8:12:30 PM	BCl3 valve closed
2/18/10	8:12:30 PM	PH3 valve closed
2/18/10	8:12:30 PM	SiCl4 pre valve closed
2/18/10	8:12:30 PM	SiCl4 post valve closed
2/18/10	8:12:30 PM	Main Vac valve closed
2/18/10	8:12:30 PM	Bypass valve closed
2/18/10	8:12:30 PM	Bubbler valve closed
2/18/10	8:12:30 PM	Helium MFC set to  0.000000
2/18/10	8:12:30 PM	H2 MFC set to  0.000000
2/18/10	8:12:30 PM	BCl3 MFC set to  0.000000
2/18/10	8:12:30 PM	SiCl4 MFC set to  0.000000
2/18/10	8:12:30 PM	Bypass solenoid MFC set to  760.000000
2/18/10	8:12:30 PM	Tube furnace set to 0
2/18/10	8:12:34 PM	Helium MFC set to  300.000000
2/18/10	8:12:52 PM	Program exited cleanly
2/18/10	11:33:51 PM	Recipe started at 11:33 PM
